
| Device model | VLT-2000C type | VLT-2000CF type | VLT-2000CP type |
| Size | 2000×2600×40 | 2000×2600×40 | 2000×2600×40 |
| Number of targets (pieces) | 4 | 4 | 4 |
| Sputtering power (KW) | 80×4 | 80×4 | 80×4 |
| Total installed power (KW) | 400 | 400 | 400 |
| Number of vacuum chambers (pieces) | 7 | 7 | 7 |
| Number of coating rooms (pieces) | 2 | 2 | 2 |
| Vacuum pumping unit type | Vacuum pump + oil diffusion pump | Vacuum pump + molecular pump | Vacuum pump + oil diffusion pump |
| Production cycle (minute/piece) | 3 | 3 | 4 |
| Vacuum chamber material | Stainless steel | Stainless steel | Stainless steel |
| Control method | PLC | PLC | PLC |
| Production methods | Horizontal | Horizontal | Horizontal |
| Auxiliary equipment |
Horizontal glass cleaning equipment Mirror back coating baking equipment |
Horizontal glass cleaning equipment Mirror back coating baking equipment |
Horizontal glass cleaning equipment Mirror back coating baking equipment |
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